Organic Polymer Synthesis By Cat-Cvd-Related Technology - Initiated Cvd (Icvd)

CATALYTIC CHEMICAL VAPOR DEPOSITION: TECHNOLOGY AND APPLICATIONS OF CAT-CVD(2019)

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摘要
Catalytic chemical vapor deposition (Cat-CVD) is also applicable for the preparation of organic films. As the previous explanation has been mainly for inorganic film deposition, the topic of deposition of organic films appears quite new. Thus, here, as one development form of Cat-CVD technology, we introduce a new CVD technology named as initiated chemical vapor deposition (iCVD) here, which is the most suitable technique for high-quality organic thin films.
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