0.5(Bazr0.2tio. 03)-0.5(13a0.7ca0.303) Thin Deriving From Green Sol-Gel Routes

Paola Sabrina Barbato,Paolo Aprea,Domenico Caputo,Valeria Casuscelli,Rossana Scaldaferri,Andrea Di Matteo

2019 IEEE 8TH INTERNATIONAL WORKSHOP ON ADVANCES IN SENSORS AND INTERFACES (IWASI)（2019）

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摘要

Lead-free piezoelectric thin films made of 0.5(BaZr0.2Tio s03)-0.5(Bao7Cao303) over Pt/TiOJSiOz/Si !sere synthesized by means of repeated "green" chemical solution deposition routes with the use of non-toxic solvents. Characterization results of the morphology and ferroelectric behavior of the films are reported.

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关键词

sol-gel thin films, BZT-BCT, lead-free piezoelectric materials

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