Design And Fabrication Of Cgh For 600mm Diameter Sic Primary Mirror Surface Figure Testing

Computer-generated hologram (CGH) is an effective way to compensate wavefront aberration in null test of aspheric surfaces and freeform surfaces. Our strategies of CGH design for 600mm diameter SiC primary mirror surface figure testing are presented, and an experiment demonstrating the compensation test results of CGH is reported. We design a CGH including two sections on the same substrate in order to align the CGH to the incident wavefront: main section for compensating wavefront in null test, alignment section for adjusting the relative position between CGH and interferometer. In order to isolate different orders of diffraction, we used power carrier to make different orders of diffraction come to focus at different position along the axis to avoid ghost reflections. We measured the 600mm diameter SiC primary mirror using this CGH, and the surface test result is 0.033 lambda rms.