Microfabrication of Metal Oxide Based Gas Sensors

Metal Oxide (MOX) materials have attracted a great interest for sensing applications in both chemiresistive and mass sensitive (QCM; quartz crystal microbalance, SAW; surface acoustic wave) types due to their low cost, easy production, and high sensor response against wide range of gases. However, device fabrication is a key issue for the development of sensor technologies in terms of miniaturizat...