Portable Network Analyzers For Full Characterization Of FBAR Sensors: Influence Of Readout Parameters On Sensor Performance

2021 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)(2021)

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摘要
The commercial readout electronics of thin film bulk acoustic wave resonators (FBARs) are typically implemented via free-running or phased-locked oscillators. Oscillators cannot provide the user with the full characterization of the sensor. Recently, the tendency of many network analyzer (NA) manufactures is towards miniaturized and less expensive systems. This opens up the possibility of commerci...
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关键词
FBAR,electroacoustic sensor,network analyzer,fitting,acquisition time,limit of detection,resolution
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