A novel current dependent field emission performance test

Florian Herdl,Michael Bachmann, Dominik Wohlfartsstätter,Felix Düsberg,Markus Dudeck, Magdalena Eder,Manuel Meyer,Andreas Pahlke,Simon Edler,Andreas Schels,Walter Hansch,Rupert Schreiner

2021 34th International Vacuum Nanoelectronics Conference (IVNC)（2021）

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摘要

A current dependent performance test for comparison of different field emitter arrays is introduced. Statistical analysis is enabled due to a short measurement time and as a main feature the electric field shift, comparable to the degradation of the emitter is examined. Significance of the test method is shown by a comparison of field emitter arrays with different doping levels.

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关键词

Field emitter arrays,Vacuum systems,Systematics,Statistical analysis,Current measurement,Tools,Time measurement

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