Enhanced Sensitivity of Surface Acoustic Wave (SAW) Current Sensor Based on TbDyFe Thin Film

Yuan Sun,Wen Wang,Lina Cheng,Yana Jia,Yong Liang,Yufeng Zhang

2021 IEEE International Ultrasonics Symposium (IUS)（2021）

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摘要

In this paper, a new TbDyFe thin-film coated Surface Acoustic Wave (SAW) sensor is proposed for sensing current. A 150 MHz SAW device with delay line pattern is fabricated photolithographically on 128° YX LiNbO3 substrate. Then the TbDyFe thin-film is deposited into the propagation path of surface acoustic wave by magnetron sputtering to build the sensing device. The reference sensing d...

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关键词

Sensitivity,Magnetostriction,Surface acoustic waves,Magnetoacoustic effects,Surface acoustic wave devices,Optical variables measurement,Oscillators

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