Destructive Reliability Analysis of Electromagnetic MEMS Micromirror Under Vibration Environment

Micro-Electro-Mechanical Systems (MEMS) micro-mirrors have shown great potential in consumer applications, such as Light Detection and Ranging (LiDAR) devices and portable laser projectors. The LiDAR based on electromagnetic MEMS micro-mirror is usually exposed to vibration loads for autonomous vehicles, which results in the necessity for the destructive reliability assessment of micromirrors unde...