Assembly of MEMS micro mirrors pair system in a single module

Marco Del Sarto,Luca Maggi,Alex Gritti,Amedeo Maierna, Davide Terzi, Roberto Carminati

2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)（2021）

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摘要

MEMS mirrors are among the most promising devices for the new wave of MEMS actuator devices. The general purpose of the devices(s) is to deviate a laser beam and scan a two-dimensional target. To limit the complexity of design and to maximize performances on both axes of scan, two different mirrors are chosen that then need to be coupled mechanically and optically to perform the dual scanning. Thi...

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关键词

Micromechanical devices,Temperature measurement,Performance evaluation,Temperature distribution,Optical design,Optical coupling,Mirrors

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