A Packaged THz Shunt RF MEMS Switch With Low Insertion Loss

Naibo Zhang,Ruiliang Song,Jun Liu,Jun Yang

IEEE Sensors Journal（2021）

引用 12|浏览2

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摘要

This paper demonstrates a packaged THz shunt capacitor micro-electromechanical systems (MEMS) switch with low insertion loss. In-line shunt switch is used to achieve a low loss in THz band, which is realized by reducing the equivalent parallel inductance of switch. The equivalent circuit of the switch is analyzed systematically, the equivalent resistance is obtained based on the skin effect of hig...

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关键词

Microswitches,Insertion loss,Switching circuits,Micromechanical devices,Inductance,Equivalent circuits,Sensors

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