Enablement, Evaluation and Extension of a CDM ESD Verification Tool for IC Level

Christian Russ,Kai Esmark, Patrick Huff,Jens Schneider, Gernot Langguth,Lena Zeitlhöfler, Meruzhan Cadjan,Yuri Feinberg

2021 43rd Annual EOS/ESD Symposium (EOS/ESD)（2021）

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摘要

A complex IC design marginally passes CDM targets during qualification. Employing the verification tool ESRA initially reveals CDM-uncritical voltages. Detailed testing beyond the CDM target levels and an extended tool setup provide valuable findings: pin-specific CDM robustness, design improvements, and the need to treat particular on-chip conductors as inductive components during CDM.

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关键词

Resistance,Integrated circuits,Inductance,Layout,Metals,Tools,Conductors

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