Modeling Process and Device Behavior of Josephson Junctions in Superconductor Electronics With TCAD

Thomas Weingartner,Nimesh Pokhrel,Miguel Sulangi,Lars Bjorndal,Erin Patrick,Mark E. Law

IEEE Transactions on Electron Devices（2021）

引用 6|浏览9

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摘要

We report the development of a process/device simulation platform to model superconductor electronics. The process simulator leverages the back-end modeling capabilities of Florida object-oriented process/device/reliability simulator (FLOOXS) and builds on the existing models to simulate processes specific to Josephson junction (JJ) fabrication. The device simulator uses the process generated mode...

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关键词

Object oriented modeling,Mathematical model,Oxidation,Computational modeling,Tools,Semiconductor device modeling,Metals

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