Structure and Properties of Ti-B-C Films Deposited by DC Magnetron Sputtering of TiB 2 and B4 C Targets

Volodimir Ivashchenko,Alexei Onoprienko,Petro Scrynskyy,Andriy Kozak,Elena Olifan,Andriy Kovalchenko,Alexei Sinelnitchenko, Alexander Marchuk

2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP)（2021）

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摘要

The films in Ti-B-C system have been deposited onto Si (100) substrates by dual direct current magnetron sputtering of TiB2 and B4 C targets. During deposition, the sputtering parameters at the TiB2 target were unchanged, whereas sputtering current at the B4 C target was varied in the range of 50-200 mA. The films were characterized in terms of their str...

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关键词

Magnetic films,Atom optics,Films,Magnetic resonance imaging,Magnetomechanical effects,Amorphous magnetic materials,Solids

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