Constant-current time dependent dielectric breakdown in thick amorphous SiO 2 capacitors

Federico Giuliano,Susanna Reggiani,Elena Gnani,Antonio Gnudi,Mattia Rossetti,Riccardo Depetro,Giuseppe Croce

2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS)（2021）

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摘要

Charge transport in thick amorphous silicon dioxide capacitors for integrated galvanic insulators is experimentally investigated and analyzed through numerical simulations carried out with a commercial TCAD tool. The material intrinsic defectivity and the large biases applied to such devices give rise to a leakage current which is responsible of degradation and failure. Hence it is crucial to have...

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关键词

Silicon compounds,Performance evaluation,Capacitors,Tools,Numerical simulation,Amorphous silicon,Time measurement

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