Short-Pulse Laser-Assisted Fabrication of a Si-SiO2 Microcooling Device.Alexandros Mouskeftaras,Stephan Beurthey,Julien Cogan,Gregory Hallewell,Olivier Leroy,David Grojo,Mathieu Perrin-TerrinMicromachines(2021)引用 4|浏览16关键词laser materials processing,microcooling,microfluidic deviceAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要