A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications

A forward-view optical scanner made of a MEMS mirror typically needs a second mirror to fold the optical beam forward, and thus an assembly structure is required, which drastically increases the overall size and weight of the scanner. This paper reports an ultra-small forward-view optical scanner with two vertically oriented micromirrors integrated on a silicon optical bench (SiOB). A new latch st...