Fabrication of Bloch Long Range Surface Plasmon Waveguides Integrating Counter Electrodes and Microfluidic Channels for Multimodal Biosensing
Journal of Microelectromechanical Systems(2021)
摘要
We report the fabrication of a novel multimodal biosensor combining plasmonic and electrochemical detection. The plasmonic sensors are based on monitoring the propagation of Bloch long-range surface plasmon polaritons (LRSPPs) along thin narrow Au stripes, integrating grating couplers as input/output means. The electrochemical sensors use the same Au stripes as working electrodes with nearby Pt st...
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关键词
Gold,Sensors,Optical waveguides,Gratings,Biosensors,Optical device fabrication,Lithography
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