Design, Fabrication and Characterization of Single-Crystalline Graphene gNEMS ESD Switches for Future ICs

On-chip electrostatic discharge (ESD) protection is becoming more challenging for integrated circuits (ICs) made in advanced technology nodes. The ESD-induced design overhead, including ESD parasitic effects and layout area, inherent to the traditional in-Silicon PN-junction-based ESD protection devices, rapidly becomes unbearable to high-performance and complex ICs. A disruptive above-Si mechanic...