A Low-Loss Silicon MEMS Phase Shifter Operating in the 550-GHz Band

Sofia Rahiminejad,Maria Alonso-delPino,Theodore J. Reck,Alejandro Peralta,Robert Lin,Cecile Jung-Kubiak,Goutam Chattopadhyay

IEEE Transactions on Terahertz Science and Technology（2021）

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摘要

This article presents a low-loss silicon microelectrical mechanical system (MEMS) phase shifter operating in the 500–600 GHz band. The phase shifter consists of a $\text{30-}\mu \text{m}$ thick perforated silicon slab that is moved in and out of a waveguide in the E-plane with a large deflection MEMS actuator. By implementing d...

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关键词

Slabs,Phase shifters,Silicon,Micromechanical devices,Permittivity,Actuators,Insertion loss

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