Fabrication techniques for high-performance Si heterojunction (SHJ) microcells

Megan E. Phelan,Maggie M. Potter,Pradeep Balaji, Phil R. Jahelka,Haley C. Bauser, Rebecca Glaudell,David R. Needell,Michael Enright,André Augusto,Ralph Nuzzo,Harry A. Atwater

2021 IEEE 48th Photovoltaic Specialists Conference (PVSC)（2021）

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摘要

Silicon heterojunction (SHJ) microcells offer a promising photovoltaic (PV) device for a wide range of micro-electronic applications due to their high performance potential. We examine two separate techniques for dicing SHJ microcells from bulk wafers: deep reactive ion etching (DRIE) and micro-laser cutting. We present the challenges and optimizations for each technique, as well as microcell perf...

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关键词

Photovoltaic systems,Performance evaluation,Semiconductor device modeling,Lighting,Heterojunctions,Microcell networks,Ions

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