Self-Sensing of Oscillation in Parametrically-Resonant MEMS Mirrors with Uncertain Nonlinear Dynamics

During operation in endoscopic imaging instruments, on-chip motion sensing by microelectromechanical system (MEMS) scanning mirrors can be difficult to perform due to high scanning frequencies and poorly known nonlinear behavior in system dynamics. In this work, we optimize a nonlinear model for on-chip capacitance simultaneously with a simple neural net model for unknown transmission line and cir...