The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach

The development of non-destructive subsurface imaging methods has been a major research topic in the past two decades. One of these is the use of Contact Resonance Atomic Force Microscopy (CR-AFM) to measure changes in contact stiffness to detect buried features. The depth of the buried feature has a large influence (or is a limiting factor) on the sensitivity and resolution of this method, which ...