High temperature SiC power device realized by electroless plating diffusion barrier for Ag sinter die-attach

Shinya Seki, Akio Shimoyama,Hao Zhang,Seigo Kurosaka, T. Sugioka,Hiroshi Fujita, K. Yamamura, T. Muramatsu,T. Sugahara,Shijo Nagao,Katsuaki Suganuma

2017 International Conference on Electronics Packaging (ICEP)(2017)

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摘要
Ag sinter die-attach is utilized for bonding SiC Schottky-barrier diode (SBD) dies on Cu lead frames metalized by Ni/Pd/Pt/Ag electroless plating. After Al wiring, the assembled structure was mold-packaged by imide-based high temperature thermosetting resin. The produced devices are then subjected to environmental tests of high temperature storage at 250°C, and of thermal cycling between -50°C and 250°C. The metallization layers at the bond interface remain unchanged after the harsh reliability tests because of the underlying Pt diffusion barrier layer, proving thermal stability of the bond structure up to 250°C.
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关键词
SiC power device,electroless plating,thermal stability
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