Monolithically integrated silicon nitride platform

Yusheng Bian,Colleen Meagher,Karen Nummy,Sujith Chandran,Won Suk Lee,Abdelsalam Aboketaf, Danhao Ma, Ryan Sporer,Michal Rakowski, Nuh Yuksek, Monica Esopi,Bo Peng, Yangyang Liu,Abu Thomas,Tymon Barwicz,Takako Hirokawa,Javier Ayala,Asli Sahin,Andy Stricker,Subramanian Krishnamurthy,Shuren Hu,Zoey Sowinski,Kate McLean,Louis Medina, Kevin Dezfulian,Michelle Zhang,Mona Nafari,Zhuoqiang Jia, Kaushikee Mishra,Asif Chowdhury,Francis Afzal,Brendan Harris,Salman Mosleh,Bruna Paredes,Marcus Dahlem,Jaime Viegas,Rod Augur, Dave Riggs,Luke Lee,Wenhe Lin,Ajey Jacob, Fen Jamin,Mai Randall, Hemanth Parsa,Vikas Gupta,Anthony Yu,Ken Giewont,Ted Letavic, John Pellerin

2021 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXPOSITION (OFC)（2021）

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摘要

A comprehensive set of SiN building blocks was demonstrated on a monolithic SiPh platform. Low-loss SiN waveguides (<0.35dB/cm), Si-SiN transitions (0.026dB), efficient polarization splitters/rotators, and compact ring WDM filters were realized at O-band.

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关键词

(130.3120) Integrated optics devices,(130.1750) Components,(250.5300) Photonic integrated circuits

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