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Vertical GaN Devices: Process and Reliability

Shuzhen You,Karen Geens,Matteo Borga,Hu Liang,Herwig Hahn,Dirk Fahle,Michael Heuken,Kalparupa Mukherjee,Carlo De Santi,Matteo Meneghini,Enrico Zanoni,Martin Berg,Peter Ramvall,Ashutosh Kumar,Mikael T. Bjork,B. Jonas Ohlsson,Stefaan Decoutere

Microelectronics reliability/Microelectronics and reliability（2021）

引用 10|浏览20
关键词
Vertical GaN device,Power electronics,200 mm CMOS compatible,GaN-on-polyAlN
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