Post-Fabrication Trimming of Silicon Photonic Ring Resonators at Wafer-Scale
Journal of Lightwave Technology(2021)
摘要
Silicon ring resonator-based devices, such as modulators, detectors, filters, and switches, play important roles in integrated photonic circuits for optical communication, high-performance computing, and sensing applications. However, the high sensitivity to fabrication variations has limited their volume manufacturability and commercial adoption. Here, we report a low-cost post-fabrication trimmi...
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关键词
Optical waveguides,Heating systems,Optical ring resonators,Annealing,Temperature measurement,Wavelength measurement,Optical device fabrication
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