Fmm Free Organic And Hybrid Electronics Manufacturing Enabled By Photolithography

Tung-Huei Ke, Calvin Mona Sandehang,Chi-Ting Tsai, Gema Molina Alvarez,Erwin Vandenplas, Paul Horemans,Pawel E. Malinowski

2021 5TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE (EDTM)(2021)

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摘要
Photolithography is the critical enabler to realize the scaling and integration of organic and hybrid electronics (OHE). This presentation will show our works regarding organic complementary circuits and Fine-Metal-Mask (FMM)-free sensor-in-display integration. We will show results in ultralow-power transponder, line drivers for AMOLED display, cathode patterning on top of OLED, and OLED characteristics after multiple photolithographic patterning steps.
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关键词
Photolithography, FMM-free, Cathode patterning, sensor
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