Fan-Out Wafer And Panel Level Packaging - A Platform For 3d Integration

2021 5TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE (EDTM)(2021)

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摘要
The constant drive to further miniaturization and heterogeneous system integration leads to a need for new packaging technologies that also allow large area processing and 3D integration with strong potential for low cost applications. Here, Fan-Out Wafer Level Packaging [FOWLP] is one of the latest packaging trends in microelectronics. The technology can be also used for multi-chip packages or System in Package (SiP). 3D integration is typically done by package on package (PoP) stacking where the electrical 3D routing is done by through mold (TMV) or through package vias (TPV) and a redistribution layer on both sides of the FOWLP. In summary the paper will give a review of the different technology approaches for through mold vias in a Fan-out Wafer or Panel Level Package.
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关键词
fan-out wafer level packaging,multichip packages,electrical 3D routing,Panel Level Packaging,3D integration,heterogeneous system integration,packaging technologies,low cost applications,FOWLP,microelectronics,through mold vias,TMV,through package vias,TPV,redistribution layer
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