Light-Modulated Subthreshold Swing Effect in a MoS2-Si Hetero Mosfet

Yingxin Chen,Jianan Deng,Qianqian Huang,Wenzhong Bao,Jing Wan

2021 China Semiconductor Technology International Conference (CSTIC)（2021）

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摘要

A light-modulated subthreshold swing (SS) effect in a MoS2-Si hetero MOSFET is discovered. The device is essentially a SOI MOSFET with MOS2 top gate and partly gated channel. In the experiment, the SS of the device reduces from 100.2mV/dec to 70.4mV/dec under light illumination. In the TCAD simulation, the SS also shows similar light-modulated characteristic. The operation principle is mainly dete...

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关键词

MOSFET,Lighting,Logic gates,Controllability,Sulfur,Molybdenum

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