Aberration Analysis and Control Based on Fully Connected Neural Network

Shuang Zhang,Libin Zhang,Tianyang Gai,Pengzheng Gao,Yayi Wei

2021 China Semiconductor Technology International Conference (CSTIC)（2021）

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摘要

Thermal aberration of a projection lens, which is caused by lens heating, leads to degradation of imaging quality in the Deep Ultraviolet Lithography (DUVL). Two tasks have been done in this article. One is to analyze the impact of single aberration on imaging quality, and the other is to use machine learning to calculate the combination of Zernike aberration coefficients to make the process windo...

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关键词

Heating systems,Neural networks,Lithography,Imaging,Thermal lensing,Machine learning,Optics

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