Scalable Synthesis of SnO 2 Nanosheet Arrays on Chips for Ultralow Concentration NO 2 Detection*

2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)（2021）

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摘要

This work reports a chemiresistive type of NO2 sensor based on patterned SnO2 nanosheet arrays (NSAs), which are in-situ synthesized on MEMS chips via a scalable one-step homogeneous precipitation approach. Dry etching of SnO2 NSAs is studied by using an inductively couple plasma (ICP) process. As-grown SnO2 nanosheets demonstrate ultrathin thickness with cross-linked networks. The SnO2 NSAs based...

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关键词

Micromechanical devices,Fabrication,Nanoelectromechanical systems,Dry etching,Lithography,Reproducibility of results,Sensors

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