Efficient Manufacturing of Microdome Array for Advanced Electronic and Optical Devices†

Zehua Xiang,Haobin Wang,Hang Guo,Ji Wan,Chen Xu,Liming Miao,Mengdi Han,Haixia Zhang

2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)（2021）

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摘要

Aiming at improving the precision and decreasing roughness of micro-manufacturing, this work proposes a new method that combines non-uniform graphic compensation for template preparation and demolding with viscous fluid composed of mixtures of two types of polydimethylsiloxane (PDMS), Sylgard 184 and SE 1700. Notably, this method can widely apply to a bounty of micro-manufacturing methods, such as...

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关键词

Pressure sensors,Graphics,Fluids,Sensitivity,Three-dimensional printing,Optical sensors,Optical reflection

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