Measurement and Analysis of Through Glass Via Noise Coupling and Shielding Structures in a Glass Interposer

In this article, we first measured through glass via (TGV) noise coupling and the effectiveness of shielding structures in a glass interposer. To analyze the noise coupling between signal TGVs, an open-ended structure is adopted. Glass interposer test vehicles were fabricated to verify the noise coupling between signal TGVs. With these test vehicles, noise transfer functions between signal TGVs were measured. Based on these measurement results and the equivalent circuit model, the noise coupling between signal TGVs was analyzed. To suppress this TGV noise coupling, shielding structures for the TGV noise coupling were proposed and verified. The proposed shielding structures include the variation of signal TGV pitches and the number of grounded shield TGVs, ground pads, and guard rings, respectively. The effectiveness of the proposed shielding structures was verified up to 20 GHz in frequency-domain measurements. Using the proposed shielding structures, the noise transfer function decreased by 9.4 dB at 5 GHz. Also, the effectiveness of the proposed guard ring structure was verified by a time-domain coupling noise simulation with clock signals at frequencies of 1 GHz. The proposed guard ring successfully suppressed the clock noise coupling between signal TGVs by 60.5% and 69.2% when a signal TGV pitchis 300 and 900 $\mu {\text{m}}$ , respectively.