Variable Angle Spectroscopic Ellipsometry Characterization Of Spin-Coated Mos2 Films

VACUUM(2021)

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摘要
Amongst emerging Transition Metal Dichalcogenides (TMDCs), molybdenum disulfide (MoS2) has attracted a remarkable interest thanks to many possible applications. In particular, MoS2 has potentialities not yet fully realized in solution-based applications. However, the lack of knowledge of the optical properties of MoS2 has significantly limited its use in many exciting photonic fields. Films prepared by solution-based exfoliation methods have never been studied to our best knowledge.The optical properties of MoS2 films prepared by solution-based exfoliation methods have never been studied to our best knowledge.Herein, the broadband optical properties of similar to 20 nm-thick MoS2 films deposited by spin-coating onto Si/SiO2 substrates were studied by means of micro-Raman spectroscopy and Variable Angle Spectroscopic Ellipsometry (VASE).
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关键词
Ellipsometry, Micro-Raman spectroscopy, Molybdenum disulfide, Optical properties
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