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Passivation of Thermally-Induced Defects with Hydrogen in Float-Zone Silicon

J. A. T. De Guzman,V. P. Markevich,D. Hiller,I. D. Hawkins,M. P. Halsall,A. R. Peaker

Journal of Physics D Applied Physics（2021）

Cited 6|Views10
Key words
float-zone silicon,thermal degradation,hydrogen,passivation
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