Microspectroscopic measurement and EDX analysis of NbO film with membrane structure fabricated by dry etching Mina Sato, Akihiro Matsutani, Ryo Tsukui,Masaru Kino,Kodai Yamamoto,Mikio Kurita,Tetsuya NagataThe Japan Society of Applied Physics（2021）引用 0|浏览6暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
