Si Three-Dimensional Structure Annealing In a Hydrogen Atmosphere Using a Minimal Laser Heating Tool

Kazushige Sato,Takashi Chiba,Masao Terada, Kengo Hamada, Yoshiyuki Nakayama,Yoshiaki Kanamori,Hiroyuki Tanaka, Masashi Kase,Sommawan Khumpuang,Shiro Hara

The Japan Society of Applied Physics(2021)

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