Maintaining NIST-Traceability for MEMS Sensors via In-Field Electrical Recalibration

2021 IEEE 39th VLSI Test Symposium (VTS)（2021）

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摘要

Micro Electro-Mechanical Systems (MEMS) accelerometers are used in safety critical applications, such as airbags and airplanes. While providing very accurate results, they can degrade over time due to many wearout mechanisms. According to the National Institutes of Standards and Technology (NIST), the accuracy of motion sensors used in safety critical applications needs to be maintained within 1% ...

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关键词

Degradation,Micromechanical devices,Sensitivity,Electric variables measurement,NIST,Predictive models,Electrical stimulation

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