Fabrication of high Aspect-Ratio Si Pillar-based Hybrid plasmonic-photonic Crystal Waveguides for ultra-sensitive Infrared Gas-sensing Applications

The sensing of ambient gases is of growing interest for many applications as for example indoor air quality monitoring, gas leakage or fire detection. We present the fabrication of high aspect-ratio silicon (Si) pillar-based hybrid plasmonic-photonic crystal waveguides. This type of waveguide is suitable for ultra-sensitive gas sensing applications by providing enhanced light-matter interaction du...