Combining Feature Extraction-Based and Full Trace Analysis Capabilities in Fault Detection: Methods and Comparative Analysis

As semiconductor manufacturing processes become more complex and sophisticated, manufacturers demand high quality, efficient process monitoring and fault detection (FD). Segmentation feature extraction (SFE) has been shown to be successful in FD when the anomaly patterns are well described by feature extraction, but not in cases of complex anomaly patterns. This paper proposes a novel approach tha...