On-chip Test Acceleration for Advanced Technologies

2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)(2021)

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摘要
A novel on-chip test acceleration method was developed to speed up addressable test chip measurements. Co-optimized with tester hardware, a sustained test speed of up to 40,000 items per second was achieved, corresponding to 30X of a traditional test setup. This method was employed to address critical test challenges during both technology development and mass production phases of advanced technol...
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关键词
Accelerometers,Semiconductor device measurement,Mass production,Life estimation,Hardware,System-on-chip,Manufacturing
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