Designing EDA-Compatible Cryogenic CMOS Platform for Quantum Computing Applications

2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)(2021)

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摘要
This paper presents the temperature-dependent characterizations and compact modeling on both the front-end-of-line (FEOL) and back-end-of-line (BEOL) devices based on the HLMC 40-nm low-power CMOS technology. Moreover, an EDA-compatible cryo-CMOS platform which covers the 10 $\mathrm{K} < T < 298\mathrm{K}$ region is developed to guide the design of specific cryogenic integrated circuits for quant...
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关键词
cryogenic CMOS,compact modeling,cryo-SRAM,cryo-LNA,quantum computing
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