Assessing the effect of sample orientation on dimensional X-ray computed tomography through experimental and simulated data

Measurement(2021)

引用 14|浏览5
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摘要
•X-ray computed tomography (CT) is studied under changes of sample angular tilt θ.•Dimensional accuracy of CT volumetric reconstruction is evaluated in function of θ.•Ray-casting and Radon-space analysis can be used to identify optimal sample tilt θ.•Simulation tools are useful for optimizing the sample tilt θ for X-ray CT metrology.•The dimensional deviations of the CT data are under 10 µm when scanning at optimal θ.
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关键词
X-ray CT measurement,Computed tomography,Dimensional metrology,Sample orientation,Ray-casting,Traversal-path length,Radon-space analysis,Beam hardening artifacts,Cone-beam CT artifacts
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