Improvement of the thermal sensitivity of MEMS sensors with mesh phononic nanostructuresRyoko Yamamoto, Naomi Nagai,Kazuhiko Hirakawa,Akira Kojima,Nobuyoshi Koshida,Ya ZhangThe Japan Society of Applied Physics(2021)引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要