Learning Piezoelectric Actuator Dynamics Using a Hybrid Model Based on Maxwell-Slip and Gaussian Processes

Piezoelectric actuators (PEAs) are increasingly applied to the field of ultraprecision positioning; however, unwanted nonlinearities, such as hysteresis, degrade their performance. This article integrates a Gaussian process (GP) with a Maxwell-slip (MS) model to capture nonlinearities in PEAs. The GP predicts the output of a PEA or the error of the MS model by using the current and historical appl...