Convex Inner Approximation for Mixed $H_2$ / $H_\infty$ Control With Application to a 2-DoF Flexure-Based Nanopositioning System
IEEE Transactions on Industrial Electronics(2022)
摘要
This article presents a convex inner approximation approach for mixed ${H}_2$/${H}_\infty$ control of a flexure-based nanopositioning system. Generally for such positioning systems, the inevitable existence of model mismatch renders it often times difficult-...
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关键词
Uncertainty,Optimization,Uncertain systems,System performance,Tracking,Convex functions,Semiconductor device measurement
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