Nanophotonic Crystal Waveguide with Embedded Piezoresistor on MEMS Cantilever for Sensing Application

Vijay S Palaparthy,Sandeep G. Surya,Ashwini Gajarushi,Saurabh Arun Chandorkar,Tapanendu Kundu,Maryam Shojaei Baghini,Ramgopal Rao

IEEE Sensors Journal（2021）

引用 1|浏览5

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摘要

Micro-Electro-Mechanical-System (MEMS) cantilevers are sensitive to minute changes in environmental parameters. MEMS cantilevers possess a single readout transduction mechanism like stress to frequency, resistive and capacitive changes. Here, we demonstrate a novel dual readout MEMS cantilever for sensing applications with high optical and resistive sensitivities. The proposed work focuses on the ...

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关键词

Optical device fabrication,Micromechanical devices,Optical fibers,Optical fiber sensors,Optical variables control,Optical refraction,Two dimensional displays

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