Effects of Zn X Mn1−x S Buffer Layer on Nonpolar AlN Growth on Si (100) SubstrateMasaya Morita,Keiji Ishibashi,Kenichiro Takahashi,Toyohiro Chikyow,Atsushi Ogura,Takahiro NagataJapanese Journal of Applied Physics（2021）引用 0|浏览1关键词sputtering,AlN,Zn,xSAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
