Substrate Bias Enhanced Trap Effects on Time-Dependent Dielectric Breakdown of GaN MIS-HEMTs

IEEE Transactions on Electron Devices(2021)

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摘要
In this work, we present the substrate bias enhanced trap effects on time-dependent dielectric breakdown (TDDB) in GaN metal–insulator–semiconductor high electron mobility transistors (MIS-HEMTs) by experiment. Under different substrate biases, the shape parameter $\beta $ and scale factor $\eta $ of the Weibull distribution are extracted from the experimental data. A monotonical decrease in ...
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关键词
Substrates,Logic gates,Electron traps,Gallium nitride,Electric breakdown,Dielectrics,Stress
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