Method, device, equipment and system for measuring beam splitting angle of laser beam splitter

user-5dd52aee530c701191bf1b99(2020)

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摘要
The invention discloses a method for measuring a beam splitting angle of a laser beam splitter. The method comprises the following steps: determining an initial measurement position of a rotary table;determining an initial reference light spot in the initial light spot array on the image surface of an autocollimator, and determining a first angle between other light spots except the initial reference light spot in the initial light spot array and the initial reference light spot; controlling the rotary table to rotate in a preset direction; determining a reference light spot in the current light spot array on the image plane, and determining second angles between other light spots except the reference light spot in the current light spot array and the reference light spot until the lightspot in the current light spot array and the light spot in the initial light spot array comprise light spots of all light beams in the light beam array output by the laser beam splitter; and determining the beam splitting angle of the laser beam splitter according to the first angle and the second angle. Through the method, the actual beam splitting angle of the laser beam splitter can be obtained, and high-precision detection of the beam splitting angle of the laser beam splitter is realized. The invention further provides a device, equipment and system with the advantages.
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关键词
Light beam,Autocollimator,Splitter,Optics,Image plane,Rotation,Spots,Materials science,Beam splitting,Laser beams
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